Автор: Atul Tiwari
Название: Materials and Failures in MEMS and NEMS
Категория: Наука, Образование/Техническая литература
Издательство: John Wiley & Sons Limited
ISBN: John Wiley & Sons Limited
Тип: book
Описание: The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being ac
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