Автор: Arce Gonzalo R.
Название: Computational Lithography
Категория: Наука, Образование/Техническая литература
Издательство: John Wiley & Sons Limited
ISBN: John Wiley & Sons Limited
Тип: book
Описание: A Unified Summary of the Models and Optimization Methods Used in Computational Lithography Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resol
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