Автор: Nicola Pinna
Название: Atomic Layer Deposition of Nanostructured Materials
Категория: Наука, Образование/Зарубежная образовательная литература
Издательство: John Wiley & Sons Limited
ISBN: John Wiley & Sons Limited
Тип: book
Описание: Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and produ
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